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Datos del producto:
Pago y Envío Términos:
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Velocidad de bombeo: | 1401L/s | lubricación: | Maglev |
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Reborde: | ISO-F/CF 200 | Enfriamiento: | Agua |
nombre: | Bomba de vacío molecular de la lubricación de Maglev para Chip Manufacturing | palabra clave: | Bomba molecular de Turbo |
Alta luz: | bomba de vacío molecular de la lubricación del maglev,microprocesador que fabrica la bomba de vacío molecular,bombas moleculares de turbo de la lubricación del maglev |
Maglev Pump , CXF-200/1401 , Water cooling , On board
series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, cvd, pvd and ion implantation and gases easily coagulated at normal temperature.
The advantages:
1. Zero friction during operation, and low power consumption
2. Easy to acquire really clean high vacuum and ultrahigh vacuum without lubrication for pumps
3. Capable of extracting corrosive gases for long term
4. High safety and long service life due to protection of bearings with precision ceramic balls
5. power generating function in case of sudden power-off
Specifications:
Model | CXF-200/1401 |
Pump Speed(l/s,Air) | 1400 |
Compression Ratio | >1×107 |
Ultimate Vacuum(Pa) | ≤2×10-6 |
Inlet Flange | DN200 ISO K(LF) |
DN200 ISO F | |
DN200 ISO CF | |
Outlet Flange | KF 40 |
Rotation Speed(rpm) | 33000 |
Run-up Time(min) | 6 |
VIB (mm) | <0.05 |
Backing Pump (L/s) | 15 |
Mounting or ientation | Any |
Cooling method | Water |
Weight(kg)(With Controller) | 51 |
Persona de Contacto: sales
Teléfono: +8613810212935